集成技术2023,Vol.12Issue(5):12-26,15.DOI:10.12146/j.issn.2095-3135.202211103001
纳米铜焊膏烧结互连技术研究现状与展望
Research Status and Prospect of Nano Cu Paste Sintering Interconnection Technology
摘要
关键词
纳米铜焊膏/烧结互连/集成电路封装/功率器件封装Key words
nano Cu paste/sintering interconnection/integrated circuit packaging/power device package分类
金属材料引用本文复制引用
牟运,彭洋,刘佳欣,陈明祥..纳米铜焊膏烧结互连技术研究现状与展望[J].集成技术,2023,12(5):12-26,15.基金项目
国家自然科学基金项目(62204090):航天科技集团应用创新计划项目(09428ADA) (62204090)
中国博士后面上资助项目(2021M701308)This work is supported by National Natural Science Foundation of China(62204090),Application Innovation Program of Aerospace Science and Technology Group(09428ADA),China Postdoctoral Science Foundation(2021M701308) (2021M701308)