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Advances in mobility enhancement of ITZO thin-film transistors:a review

Feilian Chen Meng Zhang Yunhao Wan Xindi Xu Man Wong Hoi-Sing Kwok

半导体学报（英文版）2023，Vol.44Issue(9)：11-25,15.

半导体学报（英文版）2023，Vol.44Issue(9)：11-25,15.DOI:10.1088/1674-4926/44/9/091602

Advances in mobility enhancement of ITZO thin-film transistors:a review

Feilian Chen ¹Meng Zhang ¹Yunhao Wan ²Xindi Xu ²Man Wong ³Hoi-Sing Kwok³

作者信息

1. College of Electronic and Information Engineering, Shenzhen University, Shenzhen 518060, China
2. Institute of Microscale Optoelectronics (IMO), Shenzhen University, Shenzhen 518060, China
3. State Key Laboratory of Advanced Displays and Optoelectronics Technologies, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China
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摘要

关键词

thin-film transistor (TFT)/indium-tin-zinc oxide (ITZO) TFT/mobility/active matrix (AM) displays

Key words

thin-film transistor (TFT)/indium-tin-zinc oxide (ITZO) TFT/mobility/active matrix (AM) displays

引用本文复制引用

Feilian Chen,Meng Zhang,Yunhao Wan,Xindi Xu,Man Wong,Hoi-Sing Kwok..Advances in mobility enhancement of ITZO thin-film transistors:a review[J].半导体学报（英文版）,2023,44(9):11-25,15.

基金项目

This work was financially supported in part by Shenzhen Municipal Research Program(Grant NO.SGDX20211123145404006),in part by National Natural Sci-ence Foundation of China(Grant NO.62274111),in part by Guangdong Basic and Applied Basic Research Foundation(Grant NO.2021A1515011858),and in part by Innovation and Technology Fund of Hong Kong(Grant NO.GHP/018/21SZ). （Grant NO.SGDX20211123145404006）

半导体学报（英文版）

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ISSN：1674-4926

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