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Low-temperature conformal vacuum deposition of OLED devices using close-space sublimation

Bryan Siu Ting Tam Shou-Cheng Dong Ching W. Tang

半导体学报（英文版）2023，Vol.44Issue(9)：62-67,6.

半导体学报（英文版）2023，Vol.44Issue(9)：62-67,6.DOI:10.1088/1674-4926/44/9/092602

Low-temperature conformal vacuum deposition of OLED devices using close-space sublimation

Bryan Siu Ting Tam ¹Shou-Cheng Dong ²Ching W. Tang²

作者信息

1. State Key Laboratory of Advanced Displays and Optoelectronics Technologies, Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China
2. State Key Laboratory of Advanced Displays and Optoelectronics Technologies, Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China||Institute for Advanced Study, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China
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摘要

关键词

close-space sublimation/OLED/thin film/low temperature/vacuum deposition

Key words

close-space sublimation/OLED/thin film/low temperature/vacuum deposition

引用本文复制引用

Bryan Siu Ting Tam,Shou-Cheng Dong,Ching W. Tang..Low-temperature conformal vacuum deposition of OLED devices using close-space sublimation[J].半导体学报（英文版）,2023,44(9):62-67,6.

基金项目

This work was financially supported by the General Research Fund(16309918)from the Research Grant Council,Hong Kong,and funding from the Institute for Advanced Study of the Hong Kong University of Science and Technol-ogy. （16309918）

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