首页|期刊导航|测试科学与仪器|正弦余弦算法支持向量回归在MEMS剪应力传感器温度补偿中的应用

正弦余弦算法支持向量回归在MEMS剪应力传感器温度补偿中的应用OA

Application of sine cosine algorithm-support vector regression on temperature compensation of MEMS shear stress sensor

中文摘要英文摘要

为解决电容式微机电系统(Micro-electromechanical system,MEMS)剪应力传感器输出信号随工作环境温度变化产生漂移的问题,提出了基于正弦余弦算法的支持向量回归(Sine cosine algorithm-support vector regression,SCA-SVR)温度补偿算法.首先,利用SVR对传感器温漂进行补偿;其次,基于SCA对SVR的超参数进行优化;最后,将所提出的SCA-SVR温度补偿算法与…查看全部>>

To solve the output signal drift of capacitive micro-electromechanical system (MEMS) shear stress sensor caused by the change of operation temperature, a sine cosine algorithm-support vector regression (SCA-SVR) for temperature compensation is proposed. The hyper-parameters of SVR are optimized based on the SCA. The proposed SCA-SVR temperature compensation algorithm is compared with the widely used partical swarm optimization-support vector regression (PSO-…查看全部>>

张佳;陈永禄;张莉;宫小清

西安航空学院电子工程学院, 陕西西安 710077中国飞行试验研究院, 陕西西安 710089西安远方航空技术发展总公司, 陕西西安 710089中软国际科技服务有限公司, 陕西西安 710077

微机电系统剪应力传感器温度补偿正弦余弦算法支持向量回归

micro-electromechanical system (MEMS)shear stress sensortemperature compensationsine cosine algorithm (SCA)support vector regression (SVR)

《测试科学与仪器》 2023 (3)

263-269,7

Special Scientific Research Program of Shaanxi Provincial Department of Education(Nos.19JK0432,20JK0697)

10.3969/j.issn.1674-8042.2023.03.002

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