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MEMS and MOEMS Gyroscopes:A Review

Wenyi HUANG Yongjun HUANG Xing YAN Sengyu ZHANG Zhe LI Jamal N.A.HASSAN Dingwei CHEN Guangjun WEN Kai CHEN Guangwei DENG

光子传感器（英文版）2023，Vol.13Issue(4)：73-98,26.

光子传感器（英文版）2023，Vol.13Issue(4)：73-98,26.DOI:10.1007/s13320-023-0693-x

MEMS and MOEMS Gyroscopes:A Review

Wenyi HUANG ¹Yongjun HUANG ¹Xing YAN ¹Sengyu ZHANG ¹Zhe LI ²Jamal N.A.HASSAN ¹Dingwei CHEN ¹Guangjun WEN ¹Kai CHEN ²Guangwei DENG³

作者信息

1. School of Information and Communication Engineering,Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent loT,University of Electronic Science and Technology of China,Chengdu 611731,China
2. School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China
3. Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054,China
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摘要

关键词

Micro-gyroscope/MEMS/MOEMS/angular random walk/bias instability

Key words

Micro-gyroscope/MEMS/MOEMS/angular random walk/bias instability

引用本文复制引用

Wenyi HUANG,Yongjun HUANG,Xing YAN,Sengyu ZHANG,Zhe LI,Jamal N.A.HASSAN,Dingwei CHEN,Guangjun WEN,Kai CHEN,Guangwei DENG..MEMS and MOEMS Gyroscopes:A Review[J].光子传感器（英文版）,2023,13(4):73-98,26.

基金项目

This work was supported in part by the National Natural Science Foundation of China(Grant Nos.U2230206,12074058,62371106,and 61971113),the National Key Research and Development Program for Young Scientists(Grant No.2022YFA1405900),the Joint Fund of Ministry of Education(Grant No.8091B022126),the Fundamental Enhancement Program Technology Area Fund(Grant No.2021-JCJQ-JJ-0667),and Sichuan Provincial Science and Technology Planning Program of China(Grant Nos.2021YJ0089,2022YFG0230,and 2023YFG0040). （Grant Nos.U2230206,12074058,62371106,and 61971113）

光子传感器（英文版）

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ISSN：1674-9251

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