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Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation

Qinghua Zhu Hongpeng Li Cong Wang Yan Hou

自动化学报（英文版）2023，Vol.10Issue(10)：1965-1983,19.

自动化学报（英文版）2023，Vol.10Issue(10)：1965-1983,19.DOI:10.1109/JAS.2023.123327

Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation

Qinghua Zhu ¹Hongpeng Li ¹Cong Wang ²Yan Hou¹

作者信息

1. School of Computer Science and Technology,Guangdong University of Technology,Guangzhou 510006,China
2. Department of Electrical and Computer Engineering,New Jersey Institute of Technology,Newark,NJ 07102-1982 USA
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摘要

关键词

Chamber cleaning/multi-cluster tools/scheduling/semiconductor manufacturing

Key words

Chamber cleaning/multi-cluster tools/scheduling/semiconductor manufacturing

引用本文复制引用

Qinghua Zhu,Hongpeng Li,Cong Wang,Yan Hou..Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation[J].自动化学报（英文版）,2023,10(10):1965-1983,19.

基金项目

This work was supported in part by the Natural Science Foundation of Guangdong Province,China(2022A1515011310). （2022A1515011310）

自动化学报（英文版）

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