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Exploration of high-speed 3.0 THz imaging with a 65 nm CMOS process

Min Liu Ziteng Cai Jian Liu Nanjian Wu Liyuan Liu

半导体学报（英文版）2023，Vol.44Issue(10)：73-80,8.

半导体学报（英文版）2023，Vol.44Issue(10)：73-80,8.DOI:10.1088/1674-4926/44/10/102401

Exploration of high-speed 3.0 THz imaging with a 65 nm CMOS process

Min Liu ¹Ziteng Cai ²Jian Liu ¹Nanjian Wu ¹Liyuan Liu¹

作者信息

1. State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
2. State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Faculty of Information Technology,Beijing University of Technology,Beijing 100124,China
折叠

摘要

关键词

power detectors/quantum cascade laser(QCL)/CMOS image sensor(CIS)/terahertz

Key words

power detectors/quantum cascade laser(QCL)/CMOS image sensor(CIS)/terahertz

引用本文复制引用

Min Liu,Ziteng Cai,Jian Liu,Nanjian Wu,Liyuan Liu..Exploration of high-speed 3.0 THz imaging with a 65 nm CMOS process[J].半导体学报（英文版）,2023,44(10):73-80,8.

基金项目

Project supported by the National Natural Science Founda-tion of China under Grant Nos.61874107,62075211. （）

半导体学报（英文版）

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ISSN：1674-4926

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