物理学报2023，Vol.72Issue(19)：274-280,7.DOI:10.7498/aps.72.20230971
Cu掺杂β-Ga2O3薄膜的制备及紫外探测性能
Preparation and ultraviolet detection performance of Cu dopedβ-Ga203 thin films
摘要
关键词
化学气相沉积法/p型β-Ga2O3/Cu掺杂/紫外光电探测器Key words
chemical vapor deposition/p-type β-Ga2O3/Cu doping/UV photodetector引用本文复制引用
刘玮,冯秋菊,宜子琪,俞琛,王硕,王彦明,隋雪,梁红伟..Cu掺杂β-Ga2O3薄膜的制备及紫外探测性能[J].物理学报,2023,72(19):274-280,7.基金项目
国家自然科学基金(批准号:12075045)、辽宁省自然科学基金(批准号:2020-MS-243)、大连市科技创新基金项目(批准号:2022JJ12GX023)和辽宁师范大学2022年高端科研成果培育资助计划(批准号:22GDL002)资助的课题.Project supported by the National Natural Science Foundation of China(Grant No.12075045),the Natural Science Foundation of Liaoning Province,China(Grant No.2020-MS-243),Dalian Technological Innovation Fund Project,China(Grant No.2022JJ12GX023),and the Liaoning Normal University 2022 Outstanding Research Achievements Cultivation Fund,China(Grant No.22GDL002). （批准号:12075045）
