高压物理学报2023，Vol.37Issue(6)：69-74,6.DOI:10.11858/gywlxb.20230681
SiC的纳秒脉冲激光烧蚀特性
Ablation Properties of Nanosecond Laser-Irradiated SiC Material
张黎 1陶彦辉 1黄元杰 1殷乾峰 1陈加政 1张永强 1谭福利1
作者信息
- 1. 中国工程物理研究院流体物理研究所, 四川 绵阳 621999
- 折叠
摘要
Abstract
A nanosecond pulsed laser ablation platform of SiC material and a nanosecond pulsed laser induced plasma experimental system were established.One dimensional fluid mechanics code was used to simulate the dynamic process of plasma jet generated by high power laser during the ablation of SiC material.The nanosecond pulsed laser ablation rule of SiC material was obtained,and the effect of laser induced plasma on ablation depth was verified through experiment and numerical simulation.The research results can provide reference for material engineering applications related to nanosecond laser ablation.关键词
SiC/纳秒脉冲激光烧蚀/激光辐照/激光诱导等离子体Key words
SiC material/nanosecond pulsed laser ablation/laser irradiation/laser induced plasma分类
数理科学引用本文复制引用
张黎,陶彦辉,黄元杰,殷乾峰,陈加政,张永强,谭福利..SiC的纳秒脉冲激光烧蚀特性[J].高压物理学报,2023,37(6):69-74,6.
