机械与电子2023，Vol.41Issue(12)：27-30,37,5.
MEMS高温压阻式压力传感器闭环控制方法
Closed-loop Control Method of MEMS High Temperature Piezoresistive Pressure Sensor
摘要
Abstract
In order to improve the overall performance of MEMS high temperature piezoresistive pres-sure sensor,a closed-loop control method of MEMS high temperature piezoresistive pressure sensor is proposed.The harmonic effect of MEMS high temperature piezoresistive pressure sensor in the working process is clarified,and the electrostatic driving and capacitance detection are analyzed.According to the a-nalysis results,the closed-loop control strategy is designed.In the closed-loop control process,the binary difference algorithm is used to compensate the temperature error of the sensor and improve the control ac-curacy.Through sensitivity calibration and zero offset calibration,the closed-loop control of MEMS high temperature piezoresistive pressure sensor is realized.The experimental results show that the proposed method has high control accuracy,high signal acquisition accuracy and good control performance.关键词
MEMS高温压阻式压力传感器/变谐效应分析/二元差值算法/误差补偿/闭环控制Key words
MEMS high temperature piezoresistive pressure sensor/variable harmonic effect analysis/binary difference algorithm/error compensation/closed-loop control分类
信息技术与安全科学引用本文复制引用
杨恩龙,殷展,魏毅,杨清海..MEMS高温压阻式压力传感器闭环控制方法[J].机械与电子,2023,41(12):27-30,37,5.基金项目
国家电网有限公司科技项目(SGSHJD00BGJS2101991) （SGSHJD00BGJS2101991）
