人工晶体学报2023，Vol.52Issue(12)：2125-2134,10.
化学气相沉积ZnS、ZnSe研究进展
Research Progress of Chemical Vapor Deposition ZnS and ZnSe
赵小玻 1韦中华 2张旭 2钱纁 2于浩海1
作者信息
- 1. 山东大学晶体材料研究院,济南 250100
- 2. 中材人工晶体研究院有限公司,北京 100018||北京中材人工晶体研究院有限公司,北京 100018
- 折叠
摘要
Abstract
Chemical vapor deposition(CVD)ZnS and ZnSe have high infrared transmittance and good optical and mechanical properties,and are the preferred infrared optical materials for infrared military detection systems.The preparation of large-sized and highly homogeneous ZnS and ZnSe materials is an important topic for future research.This article introduces the principle of chemical vapor deposition and the main problems in the accumulation process,describes the necessary optical properties of high-performance infrared materials,summarizes and analyzes the research progress of CVD ZnS and CVD ZnSe,and main defect formation mechanism of the two materials as well as the process control research.It aims to improve the production process parameters and provide theoretical reference for the batch preparation of high-performance ZnS and ZnSe materials for military applications.关键词
ZnS/ZnSe/化学气相沉积/透过率/吸收系数/缺陷/红外光学材料Key words
ZnS/ZnSe/chemical vapor deposition/transmittance/absorption coefficient/defect/infrared optical material分类
信息技术与安全科学引用本文复制引用
赵小玻,韦中华,张旭,钱纁,于浩海..化学气相沉积ZnS、ZnSe研究进展[J].人工晶体学报,2023,52(12):2125-2134,10.
