液压与气动2023，Vol.47Issue(12)：34-40,7.DOI:10.11832/j.issn.1000-4858.2023.12.005
超洁净磁悬浮针阀设计与仿真优化
Design of Ultra Clean Maglev Needle Valve and Optimization
摘要
Abstract
An ultra-clean maglev needle valve was designed to meet the high requirements for ultra-clean flow control in the semiconductor industry.An ultra-clean valve poppet enfolding the permanent magnet(PM)was developed and coated with ultra-clean fluoropolymers,and it is controlled by the external control system consisting of the suspension coil and iron core via a contactless method.In this paper,the principle of the maglev valve was first described.Then the coil turns and iron core of the drive-suspension system were optimized based on the simulation results of mechanical properties,which provides methodological guidance for optimizing of the mechanical properties and dimensional characteristics of the valve.Furthermore,the radial and axial forces of the magnetic system on the valve poppet under different offsets were calculated.The mechanical properties of the valve poppet were analyzed to verify the design scheme of the maglev valve.关键词
半导体/超洁净/针阀/磁悬浮Key words
semiconductor/ultra clean/needle valve/magnetic levitation分类
机械制造引用本文复制引用
龚轩,刘明潇,胡亮,阮晓东,苏芮,傅新..超洁净磁悬浮针阀设计与仿真优化[J].液压与气动,2023,47(12):34-40,7.基金项目
国家自然科学基金(52075475) （52075475）
浙江省"尖兵""领雁"研发攻关计划(2023C01015) （2023C01015）
