中国标准化Issue(1)：182-188,7.DOI:10.3969/j.issn.1002-5944.2024.01.030
基于卓越绩效模式测量分析改进方法对光罩静电损伤的改善研究
Study on Improvement of Electrostatic Damage of Mask Based on Measurement Analysis and Improvement Method of Performance Excellence Model
张超义 1梁伟 2闫超 3刘靖宇 2牛锋 4刘岗1
作者信息
- 1. 中国科学技术大学||中国科学院合肥物质科学研究院 固体物理研究所
- 2. 安徽省科技成果转化促进中心||安徽省科学技术研究院
- 3. 中国科学院合肥物质科学研究院研究生处
- 4. 安徽双赢再生资源集团有限公司
- 折叠
摘要
Abstract
Performance Excellence Model is the maturity model of enterprise management,and the basis for the evaluation of national quality awards at levels of provinces,cities,counties and districts.The method of measurement,analysis and improvement can be applied to the direction of enterprise organization management and quality improvement.Mask is also known as photomask plate.Due to the polarization,friction and electrostatic conduction of the mask in the clean room environment,electrostatic charge will accumulate in the chromium film of the mask pattern,and the amount of charge accumulated in different patterns of the mask will form a voltage difference.When the voltage difference between patterns exceeds the breakdown voltage of the chromium film of mask pattern,the pattern of mask will be broken by static electricity,resulting in electrostatic damage.Based on the measurement,analysis and improvement method of Performance Excellence Model,as well as the analysis and research of the electrostatic damage of mask,the paper puts forward the measures to improve the electrostatic damage of mask from two aspects of product design and mask production,and determines the improved performance measurement indicators,in order to improve product quality,enhance customer satisfaction and loyalty,and reduce the rework cost.关键词
卓越绩效模式/光罩/静电损伤/测量分析改进Key words
Performance Excellence Model/mask/electrostatic damage/measurement analysis and improvement引用本文复制引用
张超义,梁伟,闫超,刘靖宇,牛锋,刘岗..基于卓越绩效模式测量分析改进方法对光罩静电损伤的改善研究[J].中国标准化,2024,(1):182-188,7.
