中国光学（中英文）2023，Vol.16Issue(6)：1463-1474,12.DOI:10.37188/CO.EN-2023-0001
高波前拟合精度的紧凑型音圈变形镜
Compact voice coil deformable mirror with high wavefront fitting precision
摘要
Abstract
To meet the requirements of wavefront distortion correction for miniaturized adaptive optics sys-tems,a Deformable Mirror(DM)using micro voice coil actuators was designed based on systematic theoret-ical analysis.The structural parameters of the micro voice coil actuator were optimized by electromagnetic theory and the finite element method.The DM was optimized with respect to thermal deformation,reson-ance frequency,coupling coefficient and other parameters.Finally,wavefront fitting and residual calculation were completed according to the influence function.The optimized 69-element Voice Coil Deformable Mir-ror(VCDM)has a large phase stroke,good thermal stability,and a large first resonance of 2220 Hz.The RMS of the fitting residuals of the VCDM for the first 35 Zernike modes with a PV value of 1 μm are all below 30 nm.For complex random aberrations,the compact VCDM can reduce the wavefront RMS to less than 10％.Compared with a traditional VCDMs,the results of our compact VCDM indicate that it has a higher wavefront fitting precision.The compact VCDM with high performance and low cost has good potential ap-plications in human retinal or airborne imaging systems.关键词
自适应光学/变形镜/音圈驱动器/多参数分析Key words
adaptive optics/deformable mirror/voice coil actuator/multiparameter analysis分类
机械制造引用本文复制引用
胡立发,姜律,胡启立,徐星宇,黄杨,吴晶晶,俞琳..高波前拟合精度的紧凑型音圈变形镜[J].中国光学（中英文）,2023,16(6):1463-1474,12.基金项目
国家自然科学基金(No.61475152) （No.61475152）
光电对抗测试与评估重点实验室开放基金(No.GKCP2021001)Supported by National Natural Science Foundation of China(No.61475152) （No.GKCP2021001）
Fund for Key Laboratory of Elec-tro-Optical Countermeasures Test & Evaluation Technology(No.GKCP2021001) （No.GKCP2021001）
