真空电子技术Issue(6)：23-27,44,6.DOI:10.16540/j.cnki.cn11-2485/tn.2023.06.04
CNT冷阴极微焦点X射线管研制
Development of a Micro-focus X-Ray Tube Based on Carbon Nanotube Cathode
摘要
Abstract
A miniaturized closed tube micro-focusing X-ray tube based on a CNT(carbon nanotube)cathode is developed,using a single micrometer-diameter carbon nanotube yarn as the field emission elec-tron source.The cathode structure is designed and simulated using Opera software.The micro-focusing is achieved through electrostatic focusing,and the X-ray tube is enclosed in a metal housing for ultra-high vacuum sealing.Experimental results demonstrate that a continuous stable current of 500 μA can be emit-ted from a single CNT yarn cathode with a diameter of 50μm.The corresponding grid control voltage(VGC)is 886 V,resulting in an electric field intensity of 1.77 V/μm.The emission current density of the micro cathode reaches 25.5 A/cm2.The metal-housed X-ray tube can operate stably at an anode high volt-age of 130 kV.By adjusting the focusing voltage,a focal spot size of 45 μm × 58 μm is achieved using the electrostatic focusing structure.The developed micro-focusing X-ray tube operates at a duty cycle of 50％and achieves a resolution of 20 LP/mm through line pair card testing.It is capable of imaging and charac-terizing internal micro-scale components such as gold wires in chips.This micro-focusing X-ray tube meets the non-destructive testing requirements for precision components such as chips and new energy batteries and holds great potential for various applications.关键词
碳纳米管/冷阴极/微焦点/X射线管/无损检测Key words
Carbon nanotube/Cold-cathode/Micro-focus/X-ray tube/Nondestructive testing分类
电子信息工程引用本文复制引用
唐华平,陈志强,何武,金鑫,柳鹏,荆增儒,陈金梅..CNT冷阴极微焦点X射线管研制[J].真空电子技术,2023,(6):23-27,44,6.基金项目
国家自然科学基金资助项目(12327809) （12327809）
