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首页|期刊导航|半导体学报（英文版）|Controllable growth of wafer-scale PdS and PdS2 nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

Controllable growth of wafer-scale PdS and PdS2 nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

Hui Gao Hongyi Zhou Yulong Hao Guoliang Zhou Huan Zhou Fenglin Gao Jinbiao Xiao Pinghua Tang Guolin Hao

半导体学报（英文版）2023，Vol.44Issue(12)：69-77,9.
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半导体学报（英文版）2023，Vol.44Issue(12)：69-77,9.DOI:10.1088/1674-4926/44/12/122001

Controllable growth of wafer-scale PdS and PdS2 nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

Controllable growth of wafer-scale PdS and PdS2 nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

Hui Gao 1Hongyi Zhou 1Yulong Hao 2Guoliang Zhou 3Huan Zhou 1Fenglin Gao 1Jinbiao Xiao 1Pinghua Tang 1Guolin Hao4

作者信息

  • 1. School of Physics and Optoelectronics and Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan 411105, China
  • 2. College of Physics and Technology & Guangxi Key Laboratory of Nuclear Physics and Technology, Guangxi Normal University, Guilin 541004,China
  • 3. Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield S102TN, UK
  • 4. School of Physics and Optoelectronics and Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan 411105, China||National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
  • 折叠

摘要

关键词

PdS/PdS2/nanofilms/controllable growth/chemical vapor deposition/electron beam evaporation

Key words

PdS/PdS2/nanofilms/controllable growth/chemical vapor deposition/electron beam evaporation

引用本文复制引用

Hui Gao,Hongyi Zhou,Yulong Hao,Guoliang Zhou,Huan Zhou,Fenglin Gao,Jinbiao Xiao,Pinghua Tang,Guolin Hao..Controllable growth of wafer-scale PdS and PdS2 nanofilms via chemical vapor deposition combined with an electron beam evaporation technique[J].半导体学报（英文版）,2023,44(12):69-77,9.

基金项目

This work is supported by National Natural Science Foun-dation of China(No.11974301),Key Research and Develop-ment Program of Hunan Province(No.2022GK2007),Key Project from Department Education of Hunan Province(No.22A0123),Scientific Research Fund of Hunan Provincial Educa-tion Department(No.21B0136)and National college stu-dents innovation and entrepreneurship training program(No.S202310530016). （No.11974301）

半导体学报（英文版）

OACSCDCSTPCDEI

1674-4926

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