基于CMOS的新型人工表面等离激元滤波器设计
Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons
摘要
Abstract
In this paper,a novel SSPP(Spoof Surface Plasmon Polariton)filter is proposed,fabricated and measured based on 0.18 μm CMOS technology.Meanwhile an extra terahertz SSPP filter is designed and its full-wave simulations are provided to prove feasibility in THz band.This novel SSPP filter has a passband of 11～12.3 GHz(Sii＜-10 dB,S21＞-3.5 dB),and its size is compact with only 0.018 4 λg× 0.008 4 λg in electrical size,making it much smaller than other passive filters designed in IC technology.A designed terahertz frequency band SSPP filter,with a full EM simulated pass-band of 210.8～241.3 GHz(Si1＜-10 dB,S21＞-4.7 dB),possesses an in-band insertion loss less than 2.7 dB and an superior out-of-band suppression.Both types of SSPP filters adopt a new energy transfer method of non-contact electromagnetic coupling,with a novel structural design.Moreover,the miniaturization advantage of the microwave section SSPP coupled filter is obvious,with an electrical size of only 0.019 λg× 0.009 λg,easy to integrate with chips.Equally scaled novel fil-ters proposed in this work can work in microwave,millimeter wave and terahertz frequency band,which could be a refer-ence for the research of on-chip filters in the future.关键词
人工表面等离激元/太赫兹/耦合结构/滤波器/小型化/CMOSKey words
spoof surface plasmon polaritons/terahertz/coupling structure/filter/miniaturization/CMOS分类
信息技术与安全科学引用本文复制引用
吴杰民,陆恺,汪江鹏,高昊,段宗明,崔铁军,鲍迪..基于CMOS的新型人工表面等离激元滤波器设计[J].电子学报,2023,51(10):2708-2714,7.基金项目
国家自然科学基金(No.62288101) （No.62288101）
国家重点研发计划项目(No.2017YFA0700201,No.2017YFA0700202,No.2017YFA0700203) （No.2017YFA0700201,No.2017YFA0700202,No.2017YFA0700203）
高等学校学科创新引智计划项目(No.111-2-05) （No.111-2-05）
江苏省前沿领先技术基础研究项目(No.BK20212002) （No.BK20212002）
国家科学技术部资助项目(No.G2021016011L)National Natural Science Foundation of China(No.62288101) （No.G2021016011L）
National Key Research and De-velopment Program of China(No.2017YFA0700201,No.2017YFA0700202,No.2017YFA0700203) （No.2017YFA0700201,No.2017YFA0700202,No.2017YFA0700203）
Discipline Innovation and Talent Introduction Program in Higher Education Institutions(No.111-2-05) （No.111-2-05）
Jiangsu Province Frontier Leading Technology Basic Research Project(No.BK20212002) （No.BK20212002）
National Science and Technology Department of China grant(No.G2021016011L) （No.G2021016011L）
