计量学报2023，Vol.44Issue(12)：1799-1804,6.DOI:10.3969/j.issn.1000-1158.2023.12.03
基于非本征F-P干涉技术的全光纤位移测量系统
All-fiber Displacement Measurement System Based on Extrinsic F-P Interferometry
摘要
Abstract
In order to solve the problem that the traditional separation mirror group interferometer is too large to be applied in the environment with limited space,all-fiber F-P interferometry displacement measurement technology is studied.According to the interference principle,the influence of different reflectivity conditions on the interference signal form is analyzed.When the reflectivity is 4%,the light intensity signal of multi-beam interference will be approximately a sine function,and the displacement measurement principle is verified by finite element simulation.An all-fiber displacement measurement system based on extrinsic F-P interferometry is designed and built.The experimental results show that the standard deviation of static noise voltage within 1 min of the system is 23.3 mV,and the linear correlation coefficient R2of displacement measurement results between the system and commercial XL-80 laser interferometer is 1 within 1 mm displacement,and the measurement repeatability of the system is better than that of commercial laser interferometer.关键词
计量学/位移测量/光纤传感/F-P干涉技术/激光干涉仪/有限元仿真Key words
metrology/displacement measurement/optical fiber sensing/F-P interferometer technology/laser interferometer/finite element simulation分类
通用工业技术引用本文复制引用
马英瀚,张树,皮磊,阎晗,胡佳成,施玉书..基于非本征F-P干涉技术的全光纤位移测量系统[J].计量学报,2023,44(12):1799-1804,6.基金项目
国家重点研发计划(2021YFF0700403) （2021YFF0700403）
