航天器环境工程2023，Vol.40Issue(6)：682-691,10.DOI:10.12126/see.2023043
基于金刚石氮-空位色心的微波磁场成像技术的可靠性研究
Study on the reliability of microwave magnetic field imaging technique based on diamond nitrogen-vacancy color centers
摘要
Abstract
Compared with the development of chip design and manufacturing of monolithic microwave integrated circuits(MMIC),the research on testing and failure analysis of chips has been progressing slowly.In this paper,the application of high-spatial resolution microwave magnetic imaging based on diamond nitrogen-vacancy(NV)color center and the technical progress of inversion current distribution by magnetic imaging were firstly reviewed.On this basis,the thermal reliability of MMIC based on NV color center ensemble microwave magnetic field imaging technology was studied.The results show that,by using the microwave magnetic field imaging technology based on the diamond NV color center,through the rapid imaging and reconstruction of the two-dimensional vector field on the surface of the millimeter wave microwave chip with high spatial resolution and high sensitivity,the magnetic field imaging information of both normal and abnormal working states of chips can be collected.The precise positioning and diagnosis of the fault points inside the chip and the elimination of potential fault points can be realized by further inversion and reconstruction of the internal information of the microwave chip.The proposed research is expected to provide reliability diagnosis for chip design,production and testing.关键词
单片微波集成电路/失效模式分析/磁成像/氮-空位色心/芯片热态可靠性Key words
monolithic microwave integrated circuit/failure mode analysis/magnetic imaging/nitrogen-vacancy color center/chip thermal reliability分类
信息技术与安全科学引用本文复制引用
唐雨桐,叶安,付鼎元,李晓林,张超..基于金刚石氮-空位色心的微波磁场成像技术的可靠性研究[J].航天器环境工程,2023,40(6):682-691,10.基金项目
民用航天预研项目D040301 （）
