无机材料学报2023，Vol.38Issue(12)：1405-1412,8.DOI:10.15541/jim20230164
基于等离子体诊断的MPCVD单晶金刚石生长优化设计
Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics
摘要
Abstract
Microwave plasma chemical vapor deposition(MPCVD)technology is an ideal way to prepare large size and high-quality single crystal diamonds.However,the complexity of MPCVD single crystal diamond growth and the diversity of crystal growth requirements make it difficult to optimize the growth process.To address this issue,a systematic design method for MPCVD single crystal diamond growth based on plasma diagnostic technology was proposed,using plasma imaging and spectral analysis to quantitatively diagnose microwave plasma.The physical coupling characteristics and quantitative relationship between pressure,microwave(MW)power,plasma properties,and substrate temperature were studied by using home-made MPCVD system.And the size of major axis,precursor group concentration and distribution,energy density,and other data of the plasma under different parameters were obtained.Based on experimental data,the growth process map of single crystal diamond was obtained.According to this map,we selected process parameters by growth temperature and growth area.Through experimental verification,it is shown that this map is usful for guiding prediction with parameter error of less than 5%.Simultaneously,based on the predicted map,growth of single crystal diamond under different plasma energy densitiesis studied.At lower power(2600 W),a higher energy density(148.5 W/cm3)was obtained,and the concentration of carbon containing precursors was higher than that of the other parameters,resulting in a higher growth rate(8.9 μm/h).By this method system,effective plasma control and process optimization can be carried out meeting for different single crystal diamond growth.关键词
MPCVD/单晶金刚石生长/等离子体/生长参数优化Key words
MPCVD/single crystal diamond growth/plasma/optimization of growth parameters分类
化学化工引用本文复制引用
李一村,郝晓斌,代兵,文东岳,朱嘉琦,耿方娟,乐卫平,林伟群..基于等离子体诊断的MPCVD单晶金刚石生长优化设计[J].无机材料学报,2023,38(12):1405-1412,8.基金项目
国家自然科学基金(52072087) （52072087）
国家重点研发计划(2020YFA0709700) （2020YFA0709700）
黑龙江省自然科学基金(YQ2020E008) （YQ2020E008）
深圳市科技计划(JSGG20201102162002006)National Natural Science Foundation of China(52072087) （JSGG20201102162002006）
National Key R&D Program of China(2020YFA0709700) （2020YFA0709700）
Natural Science Foundation of Heilongjiang Province(YQ2020E008) （YQ2020E008）
Shenzhen Science and Technology Plan(JSGG20201102162002006) （JSGG20201102162002006）
