无机材料学报2023，Vol.38Issue(12)：1413-1419,7.DOI:10.15541/jim20230202
2英寸MPCVD光学级均匀金刚石膜的制备研究
Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film
摘要
Abstract
The uniform growth of large-size optical grade diamond films has been one of the hot spots and difficulties in the field of microwave plasma chemical vapor deposition(MPCVD)diamond research,in which the structure and position of the deposition platform are crucial to the uniformity of diamond films and the long-term stability of thick film growth.Here,the effect of deposition platform height on the electric field uniformity,plasma state and temperature uniformity on the substrate surface was investigated by COMSOL simulation combined with experiments to optimize the process parameters for the uniform growth of optical grade diamond films.The 2-inch diamond film with thickness of 337 μm and inhomogeneity<11%was obtained at the optimal deposition platform height of 2 mm.The full width of the Raman half-peak from the center to the edge of the film is in the range of 3-4 cm-1,and the maximum transmittance is 69%-70%in the visible light band and 70%in the infrared light at 10.6 μm.This indicates that thickness and quality of the diamond film are relatively uniform,thus the uniform deposition of 2-inch optical grade diamond film is achieved.Above results show that the deposition platform height has a great influence on the electric field distribution and plasma state on the substrate surface,and the electric field uniformity on the substrate surface is significantly improved with the increase of the deposition height,but the influence on the temperature uniformity is smaller.关键词
光学级金刚石膜/温度均匀性/红外透过率/沉积台高度/COMSOL模拟Key words
optical grade diamond film/temperature uniformity/infrared transmittance/deposition platform height/COMSOL simulation分类
数理科学引用本文复制引用
产思义,安康,郑宇亭,李成明,屠菊萍,黄珂,邵思武,杨志亮,刘鹏,刘金龙,陈良贤,魏俊俊..2英寸MPCVD光学级均匀金刚石膜的制备研究[J].无机材料学报,2023,38(12):1413-1419,7.基金项目
国家磁约束核聚变发展研究专项基金(2019YFE03100200)National MCF Energy R&D Program of China(2019YFE03100200) （2019YFE03100200）
