长沙理工大学学报（自然科学版）2023，Vol.20Issue(6)：119-127,9.DOI:10.19951/j.cnki.1672-9331.20220114001
单晶GaN纳米力学性能与切削特性试验研究
Experimental study on nano-mechanical properties and cutting characteristics of single crystal GaN
摘要
Abstract
[Purposes]This paper aims to study the mechanical properties and cutting characteristics of single crystal GaN at the micro-nano scale,which provides theoretical basis and data support for its micro-nano fabrication,and also offers a technical basis for ultra-precision processing of semiconductor hard and brittle materials.[Methods]The mechanical properties of single crystal GaN were studied by nanoindentation.The process of material removal and influence of constant load scratch parameters on the cutting characteristics were also analyzed by nano-scratch test under variable and constant load respectively.[Findings]The average hardness and elastic modulus of single crystal GaN were 6.06 and 92.90 GPa,respectively,and the elastic recovery rate and elastic energy recovery rate decreased with the increasing of pressing load.The critical loads of elastic-plastic transition and brittle-plastic transition were about 390 and 1 200 mN,respectively.The cutting force and friction coefficient increased with the increasing of cutting speed and normal load.[Conclusions]In the normal loading range of 390～1 200 mN,the ductile removal of single crystal GaN can be achieved.The reduction of brittle fracture damage in the process of scratching and improvement of machined surface quality also can be obtained.关键词
单晶GaN/纳米压入/纳米刻划/力学性能/切削特性Key words
single crystal GaN/nanoindentation/nano-scratch/mechanical property/cutting characteristic分类
信息技术与安全科学引用本文复制引用
唐昆,梁杰,张先源,欧旺平,张墨客..单晶GaN纳米力学性能与切削特性试验研究[J].长沙理工大学学报（自然科学版）,2023,20(6):119-127,9.基金项目
国家自然科学基金资助项目(51405034、51605045、51875050) （51405034、51605045、51875050）
湖南省教育厅科学研究项目(19B011) （19B011）
湖南省高新技术产业科技创新引领计划项目(2022GK4027) Projects(51405034,51605045,51875050)supported by the National Natural Science Foundation of China （2022GK4027）
Project(19B011)supported by Scientific Research Program of Hunan Education Department （19B011）
Project(2022GK4027)supported by High-Tech Industry Science and Technology Innovation Leading Program of Hunan Province （2022GK4027）
