华侨大学学报（自然科学版）2024，Vol.45Issue(1)：16-21,6.DOI:10.11830/ISSN.1000-5013.202311037
基于物方差动共焦轴向测量引导的显微镜自动对焦方法
Microscope Automatic Focusing Method Based on Height-Guidance of Object-Side Differential Confocal Axial Measurement
摘要
Abstract
Aiming at the problem of low efficiency of traditional automatic focusing methods and difficulty in adapting to the high precision and high efficiency of microscopic morphology detection in industrial products,a microscope automatic focusing method based on the height-guidance of object-side differential confocal axial measurement is proposed.After obtaining the calibration curve between the defocus amount and the axial light intensity difference in the measurement system,the motion mechanism is controlled so that the axial distance between the objective lens and the sample is used to collect images at equal steps.The current axial defocus a-mount is determined quickly through the difference in light intensity between the front and back focus posi-tions,and control the axial movement mechanism to achieve fast autofocus.A microscope autofocus experi-mental platform is built to test samples.Experimental results show that the image focusing speed and sensitivi-ty of the proposed method are better than that of DFT,EOG and other automatic focusing methods,and the axial solution of the system is better than 0.4 μm,which effectively improves the focusing speed and accuracy of the microscope.关键词
自动对焦方法/轴向测量/轴向差动共焦/物方差动/微观形貌检测Key words
autofocus method/axial measurement/axial differential confocal/object-side differential/micro-morphology detection分类
信息技术与安全科学引用本文复制引用
海涌杰,易定容,黄彩虹,袁涛,梅小华..基于物方差动共焦轴向测量引导的显微镜自动对焦方法[J].华侨大学学报（自然科学版）,2024,45(1):16-21,6.基金项目
国家自然科学基金面上基金资助项目(52375539) （52375539）
福建省自然科学基金面上基金资助项目(2021J01293) （2021J01293）
福建省自然科学基金重点资助项目(2020J02005) （2020J02005）
