舰船电子工程2023,Vol.43Issue(10):223-225,3.DOI:10.3969/j.issn.1672-9730.2021.10.046
基于钹式结构的压电加速度传感器研究
Research on Piezoelectric Accelerometer Based on Cymbal Structure
刘鹏仲 1潘元璋 1谢攀1
作者信息
- 1. 中国人民解放军91388部队94分队 湛江 524022
- 折叠
摘要
Abstract
The size and weight of traditional piezoelectric accelerometers limit their sensitivity.In this paper,cymbal piezo-electric accelerometers are studied,and the sensor models of the same material and size are compared and analyzed.The results show that the voltage response of piezoelectric accelerometer mainly depends on its Z-direction deformation.The piezoelectric wafer of cymbal structure sensor has a much larger Z-direction deformation range than that of traditional structure.The tension caused by the X-direction deformation of piezoelectric wafer is the main reason for the large-scale Z-direction deformation of cymbal structure sensor.The same material and the same material are the main reasons for the large-scale Z-direction deformation of cymbal under the same natural frequency,the voltage response of cymbal structure is much higher than that of traditional structure.Cymbal struc-ture can significantly improve the sensitivity of piezoelectric sensor.关键词
钹式结构/压电/加速度传感器Key words
cymbal structure/piezoelectric/acceleration sensor分类
信息技术与安全科学引用本文复制引用
刘鹏仲,潘元璋,谢攀..基于钹式结构的压电加速度传感器研究[J].舰船电子工程,2023,43(10):223-225,3.