物理学报2024，Vol.73Issue(1)：138-146,9.DOI:10.7498/aps.73.20231155
温度弱敏感光纤高温压力传感器
Optical fiber high-temperature pressure sensor with weak temperature sensitivity
王伟 1李金洋 1毛国培 1杨艳 1高志强 1马骢 1钟翔雨 1史青1
作者信息
摘要
Abstract
In aerospace,petrochemical,gas turbines and other high-temperature environments,pressure measurement of equipment has always been a challenge to be solved.The electrical high temperature pressure sensor has the problem of component failure in high temperature environment,and it is difficult to use in the high temperature environment for a long time.The detection device of the optical fiber sensor does not include electrical components,so it has the advantages of high working temperature,high measurement accuracy,anti-electromagnetic interference and so on.In order to use a sensor to measure pressure in high temperature environment,a temperature-weakly sensitive optical fiber micro-electro-mechanical system(MEMS)pressure sensing technology is proposed.The technique uses extrisic Fabry-Pérot interference(EFPI)model.It uses the MEMS pressure chip to passively modulate the optical signal of the interference,and then realizes the pressure signal measurement.Among them,MEMS pressure sensitive chip is the core component of the sensor.The MEMS pressure sensitive chip adopts the design method of all solid state vacuum absolute pressure.Change in environmental pressure will deform the membrane.This phenomenon can cause change in the cavity of the EFPI cavity.Therefore,stress information can be obtained by measuring changes in EFPI cavity.The thermal stress and temperature parasitical response introduced by thermal expansion of the material are calculated by simulation.The influence of temperature signal on chip displacement is analyzed by the above results.On this basis,a prototype of high temperature pressure sensor is developed by combining the sub-micron white light interference response technology and low thermal stress packaging technology.In order to test the ability of the sensor to implement actual measurement,this paper carry out the pressure test and high temperature test respectively.When the pressure changes from 0 kPa to 100 kPa,the spectral intensity of the sensor output has a linear relationship with the pressure.During the temperature changing from 20-400℃,the spectral intensity of the sensor output does not change significantly.The experimental test results show that the pressure measurement of 0-100 kPa can be satisfied in the range of 20-400℃,and the measurement error introduced by temperature change is less than 4%.Therefore,the fiber pressure sensor can be used to measure the pressure in high temperature environment.关键词
高温/光纤压力传感/法布里-珀罗干涉/微机械电子芯片Key words
high temperature/fiber pressure sensor/extrisic Fabry-Pérot interference/micro-electro-mechanical system chip引用本文复制引用
王伟,李金洋,毛国培,杨艳,高志强,马骢,钟翔雨,史青..温度弱敏感光纤高温压力传感器[J].物理学报,2024,73(1):138-146,9.
