光通信技术2024，Vol.48Issue(1)：34-38,5.DOI:10.13921/j.cnki.issn1002-5561.2024.01.007
MIM波导结构耦合椭圆八字形谐振腔的折射率传感器
Refractive index sensor with MIM waveguide structure coupled elliptical octagonal resonant cavity
摘要
Abstract
In order to improve the sensitivity of optical index sensor,a metal-medium-metal(MIM)waveguide coupled elliptic eight shape cavity is designed.Firstly,the principle and key performance index of the sensor structure are analyzed theoretically.Then,the simulation structure is constructed by using finite element analysis simulation software to study its sensing performance.The simulation results show that when a=540 nm,b=340 nm,g=10 nm,l=70 nm,the sensitivity of the designed sensor can reach 1 323 nm/RIU,and the corresponding quality factor can reach 16.关键词
表面等离子体激元/金属-介质-金属波导/折射率传感器/灵敏度/有限元法Key words
surface plasmon polaritons/metal-dielectric-metal waveguide/refractive index sensor/sensitivity/finite element method分类
电子信息工程引用本文复制引用
单义婷,赵丽娟,张智娟,黄梓朦..MIM波导结构耦合椭圆八字形谐振腔的折射率传感器[J].光通信技术,2024,48(1):34-38,5.基金项目
国家自然科学基金项目(62273146、62171185)资助 （62273146、62171185）
中央高校基本科研业务费专项资金(2021MS072)资助 （2021MS072）
河北省自然科学基金项目(E2019502177、E2020502010)资助 （E2019502177、E2020502010）
河北省省级科技计划(SZX-2020034)资助. （SZX-2020034）
