光通信技术2024，Vol.48Issue(1)：60-65,6.DOI:10.13921/j.cnki.issn1002-5561.2024.01.011
氧化型VCSELs的可靠性及失效分析
Reliability and failure analysis of oxide VCSELs
摘要
Abstract
In order to study the reliability lifetime model and failure mode of oxidized vertical cavity surface-emitting lasers(VC-SELs),aging experiments are performed on oxidized VCSELs containing AlGaAs/GaAs quantum wells under different stress conditions.The failure lifetime of VCSELs under different stress conditions is obtained using extrinsic function,and then the me-dian lifetime under different stress conditions is obtained.Combined with the junction temperature of VCSELs,an accurate life-time model is obtained.Finally,the main failure characteristics and causes of oxidized VCSELs are analyzed by transmission electron microscopy(TEM).The test results show that the lifetime model parameter activation energy of oxidized VCSELs con-taining AlGaAs/GaAs quantum wells is 0.55 eV and the current acceleration factor is 2.01.The failure reason of oxidized VC-SELs is mainly related to the oxide layer with internal stress.关键词
氧化型垂直腔表面发射激光器/可靠性/寿命/激活能/失效模式/氧化层Key words
oxide vertical cavity surface emitter lasers/reliability/life/energy activation/failure mode/oxide layer分类
信息技术与安全科学引用本文复制引用
张玉岐,赵佳..氧化型VCSELs的可靠性及失效分析[J].光通信技术,2024,48(1):60-65,6.基金项目
国家重点研发计划项目(2021YFB2800301)资助. （2021YFB2800301）
