航空科学技术2024，Vol.35Issue(1)：115-124,10.DOI:10.19452/j.issn1007-5453.2024.01.013
太赫兹多层平面透镜天线的分层制造技术研究
Research on Layered Manufacturing Technology of Terahertz Multilayer Planar Transmit-array Antenna
摘要
Abstract
The rapid development of modern information technology has put forward higher requirements for radar systems,and terahertz(THz)radar has broad prospects in aerospace military applications due to its special electromagnetic advantages.As a key component of radar systems,high-gain antennas are receiving high attention in the terahertz band.When the frequency band reaches about 1.0THz,conventional processing methods suitable for low frequency devices often fail to meet design requirements,which limits their further application.This paper proposes a layered manufacturing method for terahertz transmit-array antenna(TA)based on UV-LIGA technology.In order to improve the thickness uniformity of the transmission area and facilitate subsequent assembly,the in-chip auxiliary cathode was added as an assembly area on its outer edge.Experimental verification shows that its thickness uniformity has increased by 33.08%.During the step current density electroforming experiment,when the cathode current density is 1.5A/dm2,2A/dm2,1.75A/dm2,the electroformed structure has moderate bonding strength and low surface roughness.Through the TA's wireless communication testing,the TA prototype achieves good gain in the range of 0.79THz and 1.03THz.It is expected to be applied to aerospace platforms to improve radar system recognition capabilities.关键词
UV-LIGA/透镜天线/太赫兹雷达/分层制造/微电铸Key words
UV-LIGA/transmit-array antenna/terahertz radar/layered manufacturing/micro-electroforming分类
信息技术与安全科学引用本文复制引用
刘振浩,邹小舟,缪卓伟,胡孝昀,曾永彬..太赫兹多层平面透镜天线的分层制造技术研究[J].航空科学技术,2024,35(1):115-124,10.基金项目
航空科学基金(201907052002)Aeronautical Science Foundation of China(201907052002) （201907052002）
