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基于碳化硅等离子体器件的功率脉冲锐化技术OACSTPCD

Power pulse sharpening technology based on silicon carbide plasma devices

中文摘要英文摘要

利用Sentaurus搭建了碳化硅漂移阶跃恢复二极管(DSRD)与雪崩整形二极管(DAS)全电路仿真模型,研究了碳化硅等离子体器件在脉冲锐化方面的能力,并且通过器件内部等离子浓度分布解释了这两种器件实现脉冲锐化的机制.借助碳化硅DSRD可以将峰值超过千伏的电压脉冲的前沿缩短到 300 ps;碳化硅DSRD与DAS的组合可以输出脉冲前沿在 35 ps、峰值超过 2kV的电压脉冲.仿真与实验发现当触发脉冲与碳化硅DAS匹配时,可以实现快速开启后快速关断,得益于碳化硅DAS这种神奇现象,可以将峰值在两千伏以上脉冲的半高宽缩小到百皮秒量级;通过频谱分析发现脉冲经过DAS整形后,其最高幅值-30 dB对应的频谱带宽扩大了 37 倍,达到 7.4 GHz.

A full-circuit simulation model of silicon carbide Drift Step Recovery Diode(DSRD)and Diode Avalanche Shaper(DAS)was built based on Sentaurus.By use of simulation,this paper investigates the capability of silicon carbide plasma devices in pulse sharpening and explains the mechanism of pulse sharpening achieved by these two devices through the plasma concentration distribution inside the devices.With the help of a silicon carbide DSRD,it is possible to reduce the pulse front of voltage pulses with peaks in excess of kilovolts to 300 ps.The combination of the silicon carbide DSRD and DAS can output voltage pulses with a pulse front of 35 ps and a peak of more than two kilovolts.Simulations and experiments show that when the trigger pulse is matched to the silicon carbide DAS,fast turn-on and turn-off can be achieved.Thanks to the magical phenomenon of silicon carbide DAS,it can reduce the half-height width of pulses with peak values above 2 kV to the order of 100 ps.Through spectrum analysis,it is found that after the pulse is sharpened by DAS,its-30 dB spectral width is expanded by a factor of 37 to 7.4 GHz.

郭登耀;汤晓燕;宋庆文;周瑜;郭京凯;孙乐嘉;袁昊;杜丰羽;张玉明

西安电子科技大学微电子学院,西安 710071西安电子科技大学微电子学院,西安 710071||西安电子科技大学芜湖研究院,安徽芜湖 241002

电子信息工程

碳化硅漂移阶跃恢复二极管雪崩整形二极管超宽带

silicon carbidedrift step recovery diodediode avalanche shaperultra wide band

《强激光与粒子束》 2024 (001)

亚纳秒级超快离化脉冲功率器件研究

43-48 / 6

国家自然科学基金项目(62174123)

10.11884/HPLPB202436.230209

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