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2.7~3.0μm波段高反镜反射率测量研究OACSTPCD

Reflectivity measurement of highly reflective mirrors at spectral band of 2.7-3.0 μm

中文摘要英文摘要

中红外激光领域广泛使用高性能高反射光学元件,高反射率高精度测试技术是制备高性能反射光学元件的基础.针对 2.7~3.0 μm波段光学元件高反射率测量的实际需求,基于量子级联激光器建立了连续光腔衰荡反射率测试实验装置,通过优选 2.7~3.0 μm波段反射带内水汽吸收较弱的测试波长,分析空气中水汽吸收对衰荡时间和反射率测量的影响,并比较空气和氮气环境下反射率测量结果,实现了 2.7~3.0 μm波段高反镜反射率的准确测量,在反射率约 99.95%时绝对测量精度优于 2×10-5.实验结果显示,采用测试波长 2.9 μm并在测量时保证初始腔和测试腔腔长相同,无需使用氮气环境,直接在实验室空气环境可实现高反射率的精确测量.

The highly reflective(HR)mirrors with high-performance are widely employed in mid-infrared(mid-IR)laser systems.The manufacturing of mid-IR HR mirrors with high reflectivity requires techniques to precisely measure their high reflectivity.In this paper,a continuous-wave cavity ring-down(CRD)experimental apparatus in the 2.7-3.0 μm spectral range is established based on a quantum-cascade laser for high reflectivity measurement.By precisely optimizing the laser wavelength within the reflection band of the mid-IR HR mirrors,analyzing the influence of water vapor absorption on the ring-down time and reflectivity measurements,and comparing the reflectivity results measured under ambient air in clean-room laboratory and under nitrogen purging,the accurate measurement of high reflectivity is achieved at the 2.7-3.0 μm spectral band with an absolute reflectivity measurement accuracy of below 2×10-5 for about 99.95%reflectivity.The experimental results demonstrate that by setting the laser wavelength precisely to 2.9 μm and employing equal lengths of initial and test ring-down cavities(RDC)to avoid the influence of water vapor's absorption lines,the reflectivity measurement for the 2.7-3.0 μm spectral band can be performed under normal clean-room laboratory air,without the need of nitrogen purging.

周文超;魏千翯;彭琛;黄德权;朱日宏

南京理工大学电子工程与光电技术学院,南京 210094||中国工程物理研究院应用电子学研究所,四川绵阳 621900电子科技大学光电科学与工程学院,成都 610054中国工程物理研究院应用电子学研究所,四川绵阳 621900南京理工大学电子工程与光电技术学院,南京 210094

电子信息工程

中红外高反镜反射率光腔衰荡水汽吸收

mid-infraredhighly reflective mirrorreflectivitycavity ring-downabsorption of water vapor

《强激光与粒子束》 2024 (001)

97-102 / 6

10.11884/HPLPB202436.240014

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