人工晶体学报2024，Vol.53Issue(1)：138-144,7.
TOPCon太阳能电池选择性发射极工艺研究
Process Study on Selective Emitter of TOPCon Solar Cells
杨露 1宋志成 1倪玉凤 1张婷 1魏凯峰 1阮妙 1石惠君 1郑磊杰1
作者信息
- 1. 青海黄河上游水电开发有限责任公司西安太阳能电力分公司,西安 710010
- 折叠
摘要
Abstract
In order to improve the photoelectric conversion efficiency of tunnel oxide passivated contact(TOPCon)solar cells,the selective emitter structure was prepared by boron diffusion and laser doping.The effects of sheet resistance of boron diffusion,power output ratio of laser and oxidation time on the passivation of the emitter were studied.The experimental results show that when the sheet resistance is 140 Ω/□,the oxidation temperature is 1 020 ℃,and the oxidation time is 30 min,the sheet resistance of light doping region(p+)reaches 320 Ω/□,the corresponding implied open circuit voltage reaches 729 mV,and the dark saturation current density is 12 fA/cm2.The sheet resistance of heavily doping region(p++)reaches 113 Ω/□.the corresponding implied open circuit voltage reaches 710 mV,and the dark saturation current density is 26 fA/cm2.Based on the selective emitter process,the highest conversion efficiency of 24.75％was obtained with an open circuit voltage of 720 mV,and a short-circuit current improvement of 30 mA,leading to an absolute efficiency gain of 0.26 percent point for the champion conversion efficiency.关键词
TOPCon太阳能电池/选择性发射极/硼扩散/激光/氧化/光电转化效率Key words
TOPCon solar cell/selective emitter/boron diffusion/laser/oxidation/photoelectric conversion efficiency分类
信息技术与安全科学引用本文复制引用
杨露,宋志成,倪玉凤,张婷,魏凯峰,阮妙,石惠君,郑磊杰..TOPCon太阳能电池选择性发射极工艺研究[J].人工晶体学报,2024,53(1):138-144,7.
