实验科学与技术2023，Vol.21Issue(6)：14-18,5.DOI:10.12179/1672-4550.20230103
基于传输线模型法ITO/p-Si接触性能研究实验设计
Experimental Design for ITO/p-Si Contact Properties Based on Transmission Line Model
摘要
Abstract
In response to the problem of single content in traditional transparent oxide thin film electrical performance testing experiments,combined with teachers'lectures and research project,an exploratory experiment"ITO/p-Si contact properties based on transmission line model"and the corresponding assessment system were designed.The variety law and reason of contact resistivity and barrier height of ITO/p-Si contacts under different preparation conditions were analyzed by testing their electrical properties.The experiment assessment system covers literature review,sample preparation,performance measurement,data analysis and extension experiment.The experiment is comprehensive and progressive,which can consolidate professional theoretical knowledge,stimulate students'interest in learning,and increase students'innovative ability.关键词
接触性能/传输线模型/实验设计/透明导电氧化物Key words
contact property/transmission line model/experimental design/transparent conductive oxide分类
数理科学引用本文复制引用
李金泽,许杰..基于传输线模型法ITO/p-Si接触性能研究实验设计[J].实验科学与技术,2023,21(6):14-18,5.基金项目
国家自然科学基金(61904088). （61904088）
