物理学报2024，Vol.73Issue(2)：166-179,14.DOI:10.7498/aps.73.20231056
激光维持等离子体多物理场耦合模型与仿真
Multiphysics modeling and simulations of laser-sustained plasmas
摘要
Abstract
Laser-sustained plasma(LSP),which can be utilized for a novel radiation light source,has advantages such as high irradiance,broad spectral range,and stable emission,demonstrating significant applications in wafer inspection in the field of the semiconductor industry.This paper revisits the historical development of LSP research and introduces fundamental physical processes in LSP.The mathematical description equations for LSP and methods of calculating plasma parameters are provided,thereby a time-dependent two-dimensional fluid model is established by taking into consideration a laser-thermal-hydrodynamic coupling effect.The propagation of the laser in plasma is investigated based on the established model,and the fundamental processes in LSP,including the initial evolution process,laser energy deposition,steady-state characteristics,and instability,are explored.The effectiveness of the simulation model is confirmed through comparing with the experimental results of high-pressure Xe LSP.The findings indicate that the mode,power,F-number of incident lasers,as well as parameters including components,pressure,and flow velocity of gas,can all affect the steady-state properties of LSPs.Under the identical power and F-number conditions,Gaussian mode laser and annular mode laser both produce LSPs with different shapes and positions.Notably,under the conditions of high-power annular laser incidence,large laser F-number,and high flow velocity,the simulation results reveal temporal and spatial instability in LSP.These simulation results contribute significantly to a more in-depth understanding of the underlying physical mechanisms of the LSP.Furthermore,they provide a theoretical basis for designing the light source system and optimizing the multiple parameters.The influence of laser parameters on LSP properties elucidated in this study not only advances the fundamental understanding of LSP but also offers crucial insights for designing and optimizing the light source systems in various applications,particularly in the field of optical detection for semiconductor wafer inspection.关键词
激光维持等离子体/流体模型/多物理场耦合/辐射与输运Key words
laser-sustained plasma/fluid modeling/multiphysics modeling/radiation and transport引用本文复制引用
张东荷雨,刘金宝,付洋洋..激光维持等离子体多物理场耦合模型与仿真[J].物理学报,2024,73(2):166-179,14.基金项目
国家自然科学基金(批准号:52277154)资助的课题. Project supported by the National Natural Science Foundation of China(Grant No.52277154). （批准号:52277154）
