原子与分子物理学报2024，Vol.41Issue(5)：94-100,7.DOI:10.19855/j.1000-0364.2024.053001
2.45GHz ECR强流等离子体源核心部件设计与实验研究
Design and experimental study of core components of a 2.45 GHz ECR high-current plasma source
摘要
Abstract
Electron Cyclotron Resonance(ECR)plasma sources can produce highly charged ions and high-current single-charged ions,providing stable beam and good repeatability.The design of the core components is crucial to the ECR plasma source,as the magnetic field has a direct impact on the generation and distribution of the plasma.Finite element analysis was used to analyze and design the magnetic field of the ECR plasma source,and a magnetic field configuration that meets the design requirements and targets was obtained.The axial mag-netic field of the designed permanent magnet was accurately measured using a Gaussmeter,and the simulation re-sults were found to be in good agreement with the experimental results,with only slight deviations in the maxi-mum value and corresponding position of the axial magnetic field.Through integrated experiments,the effect of the core components on the beam current extracted from the ion source was studied,and a stable beam current with an intensity of up to 7mA was achieved.关键词
ECR等离子体源/磁场设计/引出束流Key words
ECR plasma source/Magnetic field design/Extraction of beam分类
化学化工引用本文复制引用
李钢,陈根,段文学,彭标,尉传颂..2.45GHz ECR强流等离子体源核心部件设计与实验研究[J].原子与分子物理学报,2024,41(5):94-100,7.基金项目
国家重点研发计划(E05KCI25591) （E05KCI25591）
