中国光学（中英文）2024，Vol.17Issue(1)：140-149,10.DOI:10.37188/CO.2023-0042
凹非球面的非零位干涉检测技术
A non-null interferometry for concave aspheric surface
摘要
Abstract
To realize the rapid,high-precision,and universal testing of concave aspheric surface,a non-null interferometry method is proposed in this paper,which takes the asphere as a spherical surface and measures it directly with an interferometer.Combined with the corresponding data processing methods,the test results of the aspheric surface are obtained.Firstly,the detection theory of this method is introduced,the calculation and removal models of retrace error and adjustment error are established,and the data processing method of shape error is studied.Secondly,taking two concave aspherical surfaces with different parameters as an ex-ample,the retrace error and adjustment error are simulated,which verified the effectiveness of the method.Finally,a non-null interferometry experimental setup of concave aspheric surface is performed,and its shape error is successfully obtained.By comparing the results with autocollimation method or LUPHOScan meth-od,it is shown that the surface distribution and evaluation indicators of the results are highly consistent,which verifies the correctness of this method.This method provides an effective measurement method for concave aspheric surface with high precision,universality,and convenience.关键词
非球面面形测量/非零位干涉检测/回程误差/数据处理Key words
aspheric surface shape measurement/non-null interferometry/retrace error/data processing分类
信息技术与安全科学引用本文复制引用
张旭,李世杰,刘丙才,田爱玲,梁海锋,蔡长龙..凹非球面的非零位干涉检测技术[J].中国光学（中英文）,2024,17(1):140-149,10.基金项目
陕西省科技厅资助项目(No.2022GY-222,No.2022GY-262) （No.2022GY-222,No.2022GY-262）
基础科研(No.JCKY2020426B009) （No.JCKY2020426B009）
"一带一路"外国专家创新人才交流项目(No.DL2022040006L)Supported by Department of Science and Technology Project of Shaanxi Province(No.2022GY-222,No.2022GY-262) （No.DL2022040006L）
Basic Scientific Research(No.JCKY2020426B009) （No.JCKY2020426B009）
"The Belt and Road"Foreign Experts In-novative Talent Exchange Project(No.DL2022040006L) （No.DL2022040006L）
