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Progress in efficient doping of Al-rich AlGaN

Jiaming Wang Fujun Xu Lisheng Zhang Jing Lang Xuzhou Fang Ziyao Zhang Xueqi Guo Chen Ji Chengzhi Ji Fuyun Tan Xuelin Yang Xiangning Kang Zhixin Qin Ning Tang Xinqiang Wang Weikun Ge Bo Shen

Journal of Semiconductors2024，Vol.45Issue(2)：P.10-20,11.

Journal of Semiconductors2024，Vol.45Issue(2)：P.10-20,11.DOI:10.1088/1674-4926/45/2/021501

Progress in efficient doping of Al-rich AlGaN

Jiaming Wang ¹Fujun Xu ¹Lisheng Zhang ²Jing Lang ¹Xuzhou Fang ¹Ziyao Zhang ¹Xueqi Guo ¹Chen Ji ¹Chengzhi Ji ¹Fuyun Tan ¹Xuelin Yang ¹Xiangning Kang ¹Zhixin Qin ²Ning Tang ³Xinqiang Wang ³Weikun Ge ¹Bo Shen³

作者信息

1. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China
2. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China Beijing SinoGaN Semiconductor Technology Co.,Ltd.,Beijing 101399,China
3. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China Nano-optoelectronics Frontier Center of Ministry of Education,Peking University,Beijing 100871,China Collaborative Innovation Center of Quantum Matter,Beijing 100871,China
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摘要

关键词

AlGaN-based UV-LEDs/Al-rich AlGaN/doping

分类

信息技术与安全科学

引用本文复制引用

Jiaming Wang,Fujun Xu,Lisheng Zhang,Jing Lang,Xuzhou Fang,Ziyao Zhang,Xueqi Guo,Chen Ji,Chengzhi Ji,Fuyun Tan,Xuelin Yang,Xiangning Kang,Zhixin Qin,Ning Tang,Xinqiang Wang,Weikun Ge,Bo Shen..Progress in efficient doping of Al-rich AlGaN[J].Journal of Semiconductors,2024,45(2):P.10-20,11.

基金项目

This work was supported by the National Key Research and Development Program of China(No.2022YFB3605100) （No.2022YFB3605100）

the National Natural Science Foundation of China(Nos.62234001,61927806,61974002,62135013,and 62075081) （Nos.62234001,61927806,61974002,62135013,and 62075081）

the Key-Area Research and Development Program of Guangdong Province(No.2020B010172001) （No.2020B010172001）

the Major Scientific and Technological Innovation Project(MSTIP)of Shandong Province(No.2019JZZY010209). （MSTIP）

Journal of Semiconductors

OACSTPCDEI

ISSN：1674-4926

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