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Controllable step-flow growth of GaN on patterned freestanding substrate

Peng Wu Jianping Liu Lei Hu Xiaoyu Ren Aiqin Tian Wei Zhou Fan Zhang Xuan Li Masao Ikeda Hui Yang

Journal of Semiconductors2024，Vol.45Issue(2)：P.46-50,5.

Journal of Semiconductors2024，Vol.45Issue(2)：P.46-50,5.DOI:10.1088/1674-4926/45/2/022501

Controllable step-flow growth of GaN on patterned freestanding substrate

Peng Wu ¹Jianping Liu ²Lei Hu ²Xiaoyu Ren ²Aiqin Tian ²Wei Zhou ²Fan Zhang ³Xuan Li ²Masao Ikeda ²Hui Yang³

作者信息

1. Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201210,China University of Chinese Academy of Sciences,Beijing 100049,China
2. Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China
3. Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
折叠

摘要

关键词

step-flow growth/GaN/terrace width/step motion

分类

信息技术与安全科学

引用本文复制引用

Peng Wu,Jianping Liu,Lei Hu,Xiaoyu Ren,Aiqin Tian,Wei Zhou,Fan Zhang,Xuan Li,Masao Ikeda,Hui Yang..Controllable step-flow growth of GaN on patterned freestanding substrate[J].Journal of Semiconductors,2024,45(2):P.46-50,5.

基金项目

This work was supported by the National Key Research and Development Program of China(2022YFB2802801) （2022YFB2802801）

the National Natural Science Foundation of China(61834008,U21A20493) （61834008,U21A20493）

the Key Research and Development Program of Jiangsu Province(BE2020004,BE2021008-1) （BE2020004,BE2021008-1）

the Suzhou Key Laboratory of New-type Laser Display Technology(SZS2022007). （SZS2022007）

Journal of Semiconductors

OACSTPCDEI

ISSN：1674-4926

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