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11.2 W/mm power density AlGaN/GaN high electron-mobility transistors on a GaN substrateOA北大核心CSTPCD

中文摘要

In this letter,high power density AlGaN/GaN high electron-mobility transistors(HEMTs)on a freestanding GaN substrate are reported.An asymmetricΓ-shaped 500-nm gate with a field plate of 650 nm is introduced to improve microwave power performance.The breakdown voltage(BV)is increased to more than 200 V for the fabricated device with gate-to-source and gate-to-drain distances of 1.08 and 2.92μm.A record continuous-wave power density of 11.2 W/mm@10 GHz is realized with a drain bias of 70 V.The maximum oscillation frequency(f_(max))and unity current gain cut-off frequency(f_(t))of the AlGaN/GaN HEMTs exceed 30 and 20 GHz,respectively.The results demonstrate the potential of AlGaN/GaN HEMTs on freestanding GaN substrates for microwave power applications.

Yansheng Hu;Yuangang Wang;Wei Wang;Yuanjie Lv;Hongyu Guo;Zhirong Zhang;Hao Yu;Xubo Song;Xingye zhou;Tingting Han;Shaobo Dun;Hongyu Liu;Aimin Bu;Zhihong Feng;

National Key Laboratory of Solid-State Microwave Devices and Circuits,Hebei Semiconductor Research Institute,Shijiazhuang 050051,China

电子信息工程

freestanding GaN substratesAlGaN/GaN HEMTscontinuous-wave power densitybreakdown voltageΓ-shaped gate

《Journal of Semiconductors》 2024 (001)

P.38-41 / 4

10.1088/1674-4926/45/1/012501

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