表面技术2024，Vol.53Issue(3)：88-100,122,14.DOI:10.16490/j.cnki.issn.1001-3660.2024.03.009
新型钢抛光液中磨料的种类及其性能研究进展
Advances in Research into Abrasive Materials and Their Properties in the New Steel Polishing Solution
摘要
Abstract
Abrasives mainly play a mechanical role in polishing solution.The physical and chemical properties of abrasives,such as hardness,particle size and concentration,are critical factors affecting the performance of CMP and have a greater impact on polishing efficiency.Whereas China has dependence and high demand on foreign polishing solution,and indicators including the accuracy fail to meet the market requirements,and at the same time,because the abrasives plays a vital role in the polishing performance of polishing solution,it is imperative to find better modified abrasives or new abrasive materials to promote the development of chemical mechanical polishing technology. Therefore,the work aims to summarize the new steel polishing solution developed in China and abroad in recent years,focusing on the physical and chemical properties of different substances and their effects on polishing performance,such as material removal rate,surface roughness and gloss,etc.,in the important component of polishing solution abrasives,categorizing the advantages and disadvantages of different substances,the synergy of compounding and the effects in existing polishing solution,in order to provide a reference for the subsequent study of abrasives in polishing solution formulations.The results are available in a reference for the selection of abrasives in subsequent polishing solution formulation studies.In summary,it is found that mixed and composite abrasives have a greater improvement over single abrasives,rare earth doping,core/shell structure and other improvements are of greater research value,and the synergistic effect of compounding between components has a certain effect on the improvement of polishing performance. Finally,based on the current problems in the application of steel polishing solution and the existing promising technologies,the studies of other researchers in the field of steel polishing solution in recent years are summarized and the abrasive part is discussed.It is found that the compounding and synergistic effect on the polishing efficiency of polishing solution has a certain role,and at the same time,the research of mixing and compounding abrasives,rare earth doping,etc.is also a top priority in the future research of more sophisticated steel polishing solution. Current chemical mechanical polishing mostly adopts materials such as silica and alumina as abrasives,while a variety of studies have shown that mixed and composite abrasives have a better polishing effect than single abrasives.Although research on single abrasives has been perfected,Ra can reach the nanometer level,MRR also has a more significant growth,the mixed and composite abrasives still have their unique advantages,such as comprehensive characteristics,improvement of stability and dispersion,green and environmental protection.Research on mixed and composite abrasives is still relatively small,but its development potential and broad prospects are already visible.It is believed that the research on these two can be part of the key directions for the future. Meanwhile,numerous studies have shown that the synergy between multi-component or multi-substance compounding has an outstanding impact and can produce better polishing results than a single component or substance.However,there are very few studies on this aspect and there is no more comprehensive understanding and mechanistic analysis,which needs to be pursued by in-depth research.关键词
化学机械抛光/抛光液/钢/磨料/抛光机理Key words
CMP/polishing solution/steel/abrasive/polishing mechanism分类
矿业与冶金引用本文复制引用
陈倚,张偲淼,屈蔚然,郑书佳,孙一嘉,弓爱君..新型钢抛光液中磨料的种类及其性能研究进展[J].表面技术,2024,53(3):88-100,122,14.基金项目
北京科技大学教育教学重大教改项目(JG2021ZD01) （JG2021ZD01）
北京科技大学校级规划教材项目(JC2021YB040) （JC2021YB040）
大学生创新创业项目University of Science and Technology Beijing Education and Teaching Major Teaching Reform Project(JG2021ZD01) （JG2021ZD01）
University of Science and Technology Beijing School-level Planning Textbook Project(JC2021YB040) （JC2021YB040）
University Student Innovation and Entrepreneurship Project （）
