石油物探2024，Vol.63Issue(1)：149-160,12.DOI:10.12431/issn.1000-1441.2024.63.01.013
井中永置式套管外三分量光纤MEMS地震检波器研究
Development of three-component fiber MEMS geophone:an external instrument for permanent downhole microseismic monitoring
摘要
Abstract
For permanent downhole microseismic monitoring of unconventional hydrocarbon reservoirs,we develop a type of three-component fiber MEMS geophone installed outside the casing pipe based on the Fabry-Pérot(F-P)interference principle and mi-cro-electro mechanical system(MEMS).The instrument converts microseismic signals into F-P cavity length variations,and fast demodulation is accomplished using ultrafast spectroscopy and dynamic white light interferometry.We design and theoretically simulate MEMS accelerometer chip with the sensitivity of μm/g-scale,the samples of which are fabricated using double-side expo-sure process.The external diameter of 25mm is achieved through highly integrated miniature structure design,non-gel encapsula-tion technology,and ceramic micro-machining for permanent installation outside the casing pipe and high-precision detection at high temperatures.According to performance testing conducted using the new geophone and standard electronic accelerometer in the lab,the new geophone shows resistance to high pressure of 175 MPa and high temperature of 180℃,sensitivities of 1.2382,1.2 590,and 1.086 2 μm/g,respectively,operating band of 0～350 Hz,measuring range of±5g,linearity error＜0.01％,and trans-verse crosstalk resistance＜5％.Owing to good performance of high temperature and high pressure resistance,small size,high sen-sitivity,and good linearity,the new geophone will play an important role in fracturing stimulation of unconventional reservoirs and hydrocarbon production.关键词
光纤F-P传感/永置式套管外/三分量地震检波器/MEMS芯片/耐高温高压Key words
fiber F-P sensing/permanent installation outside casing pipe/three-component geophone/MEMS chip/high temperature and high pressure resistance分类
天文与地球科学引用本文复制引用
梁兴,李东明,刘帅,张永强..井中永置式套管外三分量光纤MEMS地震检波器研究[J].石油物探,2024,63(1):149-160,12.基金项目
国家重点研发计划项目(2020YFA0710600、2021YFA0716800)资助.This research is financially supported by the National Key Research and Development Program(Grant Nos.2020YFA0710600,2021YFA0716800). （2020YFA0710600、2021YFA0716800）
