传感技术学报2024，Vol.37Issue(2)：189-194,6.DOI:10.3969/j.issn.1004-1699.2024.02.002
热振子式Z轴MEMS角速度陀螺敏感机理的研究
Study on the Sensitivity Mechanism of Thermal Oscillator Type Z-Axis MEMS Angular Velocity Gyro
摘要
Abstract
The sensitive mechanism of a thermal oscillator type Z-axis MEMS angular velocity gyro is revealed.The temperature field in-side the sensitive structure is calculated on the basis of giving the operating principle,the vibration mode of the thermal oscillator and the gyroscopic effect.The results show that:a stable temperature field is formed inside the sensitive structure after 1.8 s of power-on.The thermal oscillator establishes a driving mode in the Y direction when the angular velocity is input along the Z axis,the thermal oscil-lator moves along the X direction under the action of the Gauche force,causing the temperature field to shift,and the temperature differ-ence(ΔTX)between the two hot lines set symmetrically parallel in the X direction shows a linear growth with the increase of the input acceleration(az),and the temperature sensitivity is 125 mK/(°/s).According to the input-output(ωz-VXout)characteristic curve,a mathematical model is obtained which reveals the sensitive of the gyroscope.The sensitivity mechanism of the gyro is0.095 mV/(°/s),and the nonlinearity is 2.97％.This research provides a practical theoretical foundation for the optimized structure.关键词
陀螺/敏感机理/陀螺效应/数学模型/微机械/热振子Key words
gyroscopic/sensitive mechanism/gyroscopic effect/mathematical model/micromechanics/thermal oscillator分类
信息技术与安全科学引用本文复制引用
朴林华,佟嘉程,李备,张严..热振子式Z轴MEMS角速度陀螺敏感机理的研究[J].传感技术学报,2024,37(2):189-194,6.基金项目
国家自然科学基金资助项目(61771060) （61771060）
北京市教育委员会科研计划项目资助(KZ20231123221) （KZ20231123221）
北京市新世纪百千万人才工程培养资助项目(2019A20) （2019A20）
北京市重点实验室开放课题资助项目(2024202109) （2024202109）
北京信息科技大学促进高校分类发展项目(20240416) （20240416）
现代测控技术教育部重点实验室资助(2023202101) （2023202101）
北京信息科技大学北京市传感器重点实验室资助(2024202108) （2024202108）
北京信息科技大学学科与研究生教育校内项目(20240403) （20240403）
