热振子式Z轴MEMS角速度陀螺敏感机理的研究OA北大核心CSTPCD

The sensitive mechanism of a thermal oscillator type Z-axis MEMS angular velocity gyro is revealed.The temperature field in-side the sensitive structure is calculated on the basis of giving the operating principle,the vibration mode of the thermal oscillator and the gyroscopic effect.The results show that:a stable temperature field is formed inside the sensitive structure after 1.8 s of power-on.The thermal oscillator establishes a driving mode in the Y direction when the angular velocity is input along the Z axis,the thermal oscil-lator moves along the X direction under the action of the Gauche force,causing the temperature field to shift,and the temperature differ-ence(ΔTX)between the two hot lines set symmetrically parallel in the X direction shows a linear growth with the increase of the input acceleration(az),and the temperature sensitivity is 125 mK/(°/s).According to the input-output(ωz-VXout)characteristic curve,a mathematical model is obtained which reveals the sensitive of the gyroscope.The sensitivity mechanism of the gyro is0.095 mV/(°/s),and the nonlinearity is 2.97％.This research provides a practical theoretical foundation for the optimized structure.