传感技术学报2024,Vol.37Issue(2):195-201,7.DOI:10.3969/j.issn.1004-1699.2024.02.003
用于压阻桥式传感器的非线性与温度漂移协同矫正模型
Co-Correction Model of Nonlinearity and Temperature Drift for Piezoresistive Bridge Sensors
摘要
Abstract
A Co-correction model is proposed for two non-ideal factors(nonlinearity and temperature drift)in piezoresistive bridge sensor.The linearity module realizes the calibration of the nonlinearity of off-chip sensors through the feedback of the output signal and the algo-rithm of"square term correction";and for the temperature drift(offset and sensitivity drift),it is proposed that a new method with reconfig-urable interpolation algorithm based on the on-chip temperature look-up table.The algorithm achieves calibration of sensitivity drift and offset through temperature-addressable gain compensation technology and offset cancellation technology,respectively.With the pressure in-put range from 0 kPa to 100 kPa,the simulation results show that the model can reduce the nonlinearity error to 0.049%FSR;with the tem-perature range from-30℃to 85℃,the model can reduce the offset to 0.092‰FSR,and the sensitivity error to 0.034‰FSR.关键词
压阻桥式传感器/输出非线性矫正/可重构插值法Key words
piezoresistive bridge sensor/nonlinearity correction/reconfigurable interpolation algorithm分类
信息技术与安全科学引用本文复制引用
井凯,沈祥,蒋昊翔,王凤娟..用于压阻桥式传感器的非线性与温度漂移协同矫正模型[J].传感技术学报,2024,37(2):195-201,7.基金项目
国家自然科学基金项目(62004160) (62004160)
陕西省重点研发计划(2023-YBGY-351) (2023-YBGY-351)
西安市科技计划项目-高校院所人才服务企业项目(2023JH-GXRC-0024) (2023JH-GXRC-0024)