MEMS风速风向传感器倾斜效应研究OA北大核心CSTPCD

For the application situation of the easy occurrence of inclined condition of smart grid and buoys,the output of the micro-elec-tro-mechanical systems(MEMS)thermal wind sensors is studied.The MEMS thermal wind sensors with aerodynamic cover are simulated and tested under inclined condition.The experiments demonstrate that the measurement error of wind speed in the test is much larger than the simulation error while both the simualtion error and measurement error of the wind direction are small.This is caused by the tilted sensor after packaging.In order to solve this problem,an integrated package is realized by using 3D printing technology.Finally,the measurements indicate that the measurement error of the optimized sensor under inclined condition can achieve the performance of±(0.3+5％v)m/s for speed and±3° for direction,respectively.