传感技术学报2024，Vol.37Issue(2)：202-208,7.DOI:10.3969/j.issn.1004-1699.2024.02.004
MEMS风速风向传感器倾斜效应研究
Research of Tilt Effect for MEMS Wind Speed and Direction Sensors
摘要
Abstract
For the application situation of the easy occurrence of inclined condition of smart grid and buoys,the output of the micro-elec-tro-mechanical systems(MEMS)thermal wind sensors is studied.The MEMS thermal wind sensors with aerodynamic cover are simulated and tested under inclined condition.The experiments demonstrate that the measurement error of wind speed in the test is much larger than the simulation error while both the simualtion error and measurement error of the wind direction are small.This is caused by the tilted sensor after packaging.In order to solve this problem,an integrated package is realized by using 3D printing technology.Finally,the measurements indicate that the measurement error of the optimized sensor under inclined condition can achieve the performance of±(0.3+5％v)m/s for speed and±3° for direction,respectively.关键词
微电子机械系统/风速风向传感器/热式/倾斜效应Key words
MEMS/wind sensor/thermal/inclined condition分类
信息技术与安全科学引用本文复制引用
韦杰,王志明,田兵,张伟勋,卢星宇,李远,罗星恒,易真翔,秦明..MEMS风速风向传感器倾斜效应研究[J].传感技术学报,2024,37(2):202-208,7.基金项目
国家重点研发计划项目(2022YFB3206800) （2022YFB3206800）
南网数研院输电线路微气象MEMS风速风向传感技术研究项目(670000KK52220016) （670000KK52220016）
