电子器件2024，Vol.47Issue(1)：79-83,5.DOI:10.3969/j.issn.1005-9490.2024.01.014
集成差分电容式MEMS微型电场传感器设计与研制
Design and Development of Integrated Differential Capacitive MEMS Miniature Electric Field Sensor
摘要
Abstract
In the actual operation of relay protection,some hidden faults inside the screen cabinet will cause the pressure plate to throw back failure,which seriously threatens the safe and reliable operation of the power grid.In order to be able to reliably and effectively moni-tor the charged state or electrical conductivity of the exit pressure plate,a SOI differential capacitive MEMS electric field sensor is de-signed.The designed sensor is constructed with a reliable operating structure based on the physical design of micromechanical components and relies on a low-noise,high dynamic range interface IC to complete the operation.The designed interface IC can cope with pulsed inter-mittent operation while organizing an array of complementary devices to sense a variety of different measurement signals.The COMSOL Multiphysics simulation experiments show that the designed sensor is well suited to the demands of platen condition monitoring.关键词
继电保护/电场传感器/MEMS/硬压板Key words
relay protection/electric field sensor/micro-electro-mechanical system(MEMS)/connection piece分类
信息技术与安全科学引用本文复制引用
黄国平,陈锦荣,王跃强,廖峰..集成差分电容式MEMS微型电场传感器设计与研制[J].电子器件,2024,47(1):79-83,5.基金项目
南方电网公司科技项目(030600KK52220011(GDKJXM20220154)) （030600KK52220011(GDKJXM20220154）
