电子器件2024，Vol.47Issue(1)：84-89,6.DOI:10.3969/j.issn.1005-9490.2024.01.015
可检测有害气体的微纳电离型传感器的研究
Research on Micro Nano Ionization Sensor for Detecting Harmful Gases
摘要
Abstract
The excessive concentration of harmful gases affects the economic benefits and the safety of human life and property all the time.In order to accurately measure the concentration of these harmful gases,a new detection technology is fulfilled through the design and manufacture of micro nano ionization sensors.Benzene and toluene gases with multiple concentrations are tested under the experi-mental conditions of room temperature,atmospheric pressure and 70%relative humidity,and the corresponding recognition model is con-structed based on the characteristic noise intensity to recognize the gas concentration.The experimental results show that the fitting de-gree of the measured value and the real value of the sensor for the detection of harmful gases can reach more than 99%,which reflects a high detection accuracy.When detecting harmful gases,the sensor is in a reversible ionization equilibrium state,with good repeatability,no preheating need,safety and being non-toxic.Therefore,it is suitable for the detection of benzene gases,can meet the requirements of efficiency and accuracy,and has certain practicality.关键词
有害气体/苯/甲苯/微纳电离传感器/重复性Key words
noxious gas/benzene/toluene/miniaturized ionization sensor/repeatability分类
信息技术与安全科学引用本文复制引用
秦冲..可检测有害气体的微纳电离型传感器的研究[J].电子器件,2024,47(1):84-89,6.基金项目
2021年度河南省高等学校重点科研项目(21B460009) （21B460009）
