红外与毫米波学报2024，Vol.43Issue(1)：126-133,8.DOI:10.11972/j.issn.1001-9014.2024.01.017
应用双弹光级联差频调制的红外材料应力缺陷检测
Research on the stress defect detection of infrared material using differential frequency modulation with cascaded dual photoelastic modulators
摘要
Abstract
In order to achieve the stress defect detection of infrared materials such as Si,Ge,and GaAs,two Photoelas-tic modulators working at different frequencies are cascaded to form a polarimetry system.The birefringence retardation and fast axis azimuth introduced by the stress defect are loaded into the modulation signals of the polarimetry system.The amplitudes of the fundamental and differential frequency terms were simultaneously obtained by using digital phase-locked technology,and then the two stress parameters are solved.A detailed analysis of the detection principle was con-ducted and an experimental system was established for verification.The experimental results show that this method has achieved stress defect detection with a standard deviation of 0.31 ° for stress direction angle and 0.72 nm for stress bire-fringence retardation.The high-speed,high-precision,and high repeatability stress defect detection are realized,and the measurement of stress defect distribution in a Ge samples are demonstrated.An effective method for infrared materi-al quality testing,analysis,and evaluation is proposed.关键词
应力缺陷/弹光调制/快轴方位角/延迟量Key words
stress defect/photoelastic modulation/fast axis azimuth/retardation分类
数理科学引用本文复制引用
李克武,王爽,李孟委,王志斌..应用双弹光级联差频调制的红外材料应力缺陷检测[J].红外与毫米波学报,2024,43(1):126-133,8.基金项目
国家自然科学基金(62205309,62205310)Supported by the National Natural Science Foundation of China(62205309,62205310) （62205309,62205310）
