微流控芯片流体动压抛光工艺研究OA北大核心CSTPCD

Microstructure polishing ball was designed based on fluid dynamic pressure lubrication theory,through theoretical analysis of the microstructure in the polishing ball rotation processes to generate more fluid dynamic pressure.Fluent was used to analyze the type of microstructure and the effects of microstructure size on the dynamic pressure generated by polishing,the generated polishing force was obtained by fitting Fluent's data via MATLAB.After obtaining the better parameters of mi-crostructure,area polishing of the microfluidic chips was performed.The surface roughness of the mi-crofluidic chip plane area is reduced from 1.330 nm to 0.658 nm,and the surface roughness of the mi-crofluidic chip flow channel is reduced from 0.737 nm to 0.379 nm.Thus,the applications of hydrody-namic pressure polishing process to the deterministic polishing of microfluidic chips may be further explored.