中国机械工程2024，Vol.35Issue(3)：534-540,7.DOI:10.3969/j.issn.1004-132X.2024.03.015
微流控芯片流体动压抛光工艺研究
Research on Microfluidic Chip Fluid Dynamic Pressure Polishing Process
付振峰 1王振忠 1王彪1
作者信息
- 1. 厦门大学航空航天学院,厦门,361005
- 折叠
摘要
Abstract
Microstructure polishing ball was designed based on fluid dynamic pressure lubrication theory,through theoretical analysis of the microstructure in the polishing ball rotation processes to generate more fluid dynamic pressure.Fluent was used to analyze the type of microstructure and the effects of microstructure size on the dynamic pressure generated by polishing,the generated polishing force was obtained by fitting Fluent's data via MATLAB.After obtaining the better parameters of mi-crostructure,area polishing of the microfluidic chips was performed.The surface roughness of the mi-crofluidic chip plane area is reduced from 1.330 nm to 0.658 nm,and the surface roughness of the mi-crofluidic chip flow channel is reduced from 0.737 nm to 0.379 nm.Thus,the applications of hydrody-namic pressure polishing process to the deterministic polishing of microfluidic chips may be further explored.关键词
动压润滑理论/Fluent求解/超精密抛光/微流控芯片Key words
dynamic pressure lubrication theory/Fluent solution/ultra-precision polishing/mi-crofluidic chip分类
矿业与冶金引用本文复制引用
付振峰,王振忠,王彪..微流控芯片流体动压抛光工艺研究[J].中国机械工程,2024,35(3):534-540,7.
