中国光学（中英文）2024，Vol.17Issue(2)：334-341,8.DOI:10.37188/CO.2023-0100
星间通信系统高精度分光镜的研制
Development of high-precision beam splitter for inter-satellite communication system
摘要
Abstract
With the rapid development of inter-satellite communication systems,the requirements for data transmission accuracy are constantly increasing.As the core component,the spectral characteristics and sur-face shape accuracy of the beam splitter directly affect the transmission accuracy of the whole system.Ac-cording to the interference theory of thin film,Ta2O5 and SiO2 were selected as the high and low refractive index film materials for the design of the film system,and electron beam evaporation was used to prepare a high-precision beam splitter on a quartz substrate.At the same time,a surface shape correction model was es-tablished based on the principle of film stress compensation to control the surface shape.Through the detec-tion of a spectral analyzer,it can be seen that the transmittance of beam splitter is greater than 98%at 1563 nm and the reflectance is greater than 99%at 1540 nm within the incidence range of 21.5°to 23.5°.The surface shape was measured by laser interferometer,it can be seen that the reflective surface shape ac-curacy RMS is corrected from λ/10 to λ/90(λ=632.8 nm),and the transmissive optical surface shape accur-acy RMS is λ/90.关键词
星间通信/分光镜/应力补偿/面形精度Key words
inter-satellite communication/beam splitter/stress compensation/surface accuracy分类
数理科学引用本文复制引用
王振宇,付秀华,林兆文,黄健山,魏雨君,吴桂青,潘永刚,董所涛,王奔..星间通信系统高精度分光镜的研制[J].中国光学（中英文）,2024,17(2):334-341,8.基金项目
2022年度中山市第二批社会公益与基础研究项目(No.2022B2005) （No.2022B2005）
长春市激光制造与检测装备科技创新中心资助项目(No.2014219)Supported by the Second Batch of Social Welfare and Basic Research Projects in Zhongshan City in 2022(No.2022B2005) （No.2014219）
Changchun Laser Manufacturing and Testing Equipment Science and Technology Innovation Center Project(No.2014219) （No.2014219）
