光：科学与应用（英文版）2024，Vol.13Issue(3)：421-428,8.DOI:10.1038/s41377-023-01354-5
Laser manufacturing of spatial resolution approaching quantum limit
Laser manufacturing of spatial resolution approaching quantum limit
Xiao-Jie Wang 1Hong-Hua Fang 1Zhen-Ze Li 1Dan Wang 2Hong-Bo Sun3
作者信息
- 1. State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instrument,Tsinghua University,Beijing 100084,China
- 2. State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,2699 Qianjin Street,Changchun 130012,China
- 3. State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instrument,Tsinghua University,Beijing 100084,China||State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,2699 Qianjin Street,Changchun 130012,China
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Xiao-Jie Wang,Hong-Hua Fang,Zhen-Ze Li,Dan Wang,Hong-Bo Sun..Laser manufacturing of spatial resolution approaching quantum limit[J].光：科学与应用（英文版）,2024,13(3):421-428,8.基金项目
The authors acknowledge the financial support from the National Natural Science Foundation of China(No.62075115,62335013)and the National Key R&D Program of China(No.2022YFB4600400). （No.62075115,62335013）
