电子学报2024，Vol.52Issue(2)：407-413,7.DOI:10.12263/DZXB.20220346
框架结构对薄膜体声波谐振器性能提升的研究
The Performance Improvement of Thin Film Bulk Acoustic Resonators by Frame Structure
摘要
Abstract
The effect of frame on the performance improvement of thin film bulk acoustic resonator(FBAR)is stud-ied.Based on the basic theory of reflection and matching of two kinds of frame structures to keep acoustic energy,accord-ing to their functional characteristics,several groups of frame microstructure combinations of low frequency and high fre-quency are determined experimentally,and the two groups of FBAR are taped out.Finally,the resonator of all groups is ob-tained by on-wafer test.The selected frame structure group can improve the performance of both low-frequency and high-frequency FBAR.For low frequency(around 1.7 GHz)FBAR,the quality factor of parallel resonance can be increased by more than 1 000.For high frequency(around 5.5 GHz)FBAR,the quality factor of parallel resonance can be increased by more than 300.For the high frequency FBAR with strong transverse parasitic mode,the optimized frame structure can im-prove the transverse parasitic suppression and reduce the impedance phase fluctuation under the series resonant frequency by more than 5°.关键词
薄膜体声波谐振器/框架结构/流片实验/阻抗相位波动Key words
film bulk acoustic resonator/frame structure/taping out experiment/impedance phase fluctuation分类
信息技术与安全科学引用本文复制引用
吴永乐,吴昊鹏,赖志国,蔡洵,唐滨,杨清华,杨雨豪,王卫民..框架结构对薄膜体声波谐振器性能提升的研究[J].电子学报,2024,52(2):407-413,7.基金项目
国家自然科学基金(No.U20A20203,No.61971052) （No.U20A20203,No.61971052）
北京邮电大学中央高校基本科研业务费行动计划项目(No.2021XD-A07-2) （No.2021XD-A07-2）
广东省重点领域研发计划项目(No.2020B0101080001) National Natural Science Foundation of China(No.U20A20203,No.6197052) （No.2020B0101080001）
Fundamental Re-search Funds for the Central Universities of Beijing University of Pets and Telecommunications(No.2021XD-A07-2) （No.2021XD-A07-2）
Key Research and Development Project of Guangdong Province(No.2020B0101080001) （No.2020B0101080001）
